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Kvantovaya Elektronika, 1994 Volume 21, Number 11, Pages 1090–1092 (Mi qe234)

This article is cited in 1 paper

Laser applications and other topics in quantum electronics

Optimisation of a grating device for coupling radiation in and out of a thin-film waveguide on a silicon substrate

O. Parriauxa, V. A. Sychugovb, A. E. Tikhomirovb, A. V. Tishchenkob, B. A. Usievichb

a Swiss Center for Electronics and Microtechnology Neuchâtel
b A. M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow

Abstract: An analysis is reported of the operation and optimisation of the parameters of a grating device for coupling radiation in and out of a thin-film waveguide formed on a silicon substrate. The reflection of light at the interface between a buffer layer and silicon significantly alters the operation of such a grating coupler. The conditions for maximum coupling out of radiation into air or into the substrate are obtained for the TE and TM modes of the thin-film waveguide.

PACS: 42.82.Et

Received: 11.02.1994


 English version:
Quantum Electronics, 1994, 24:11, 1013–1015

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