Characterization of multilayer x-ray mirrors for the $\lambda\simeq$ 19 nm range using a laser-plasma radiation source

A laser-plasma radiation source employing the second harmonic of a $\lambda$-switched Nd:YAlO$_3$ laser ($\lambda$ = 0.54 $\mu$m) has been used to study multilayer, normal-incidence, focusing x-ray mirrors. Using a Mo–Si-coated mirror ($\lambda$ = 19.3 nm) as an example, we have demonstrated the feasibility of measuring the angular resolution ($\leq$1"), the spectral shape of the resonance reflection curve, and its uniformity over an aperture 60 mm in diameter.