N. G. Basov, Yu. A. Bykovskiĭ, A. V. Vinogradov, A. A. Galichiĭ, M. P. Kalachnikov, V. L. Kantsyrev, Yu. P. Kozyrev, M. Yu. Mazur, Yu. A. Mikhaĭlov, V. P. Puzyrev, A. V. Rode, G. V. Sklizkov, I. Ya. Frondzeĭ, “Investigation of a laser-plasma source of soft x rays operating at laser power densities 5×1011–2×1014 W/cm2”, Kvantovaya Elektronika, 1982, Volume 9, Number 8,Pages 1525

This article is cited in 5 papers

Investigation of a laser-plasma source of soft x rays operating at laser power densities 5×10¹¹–2×10¹⁴ W/cm²

N. G. Basov, Yu. A. Bykovskiĭ, A. V. Vinogradov, A. A. Galichiĭ, M. P. Kalachnikov, V. L. Kantsyrev, Yu. P. Kozyrev, M. Yu. Mazur, Yu. A. Mikhaĭlov, V. P. Puzyrev, A. V. Rode, G. V. Sklizkov, I. Ya. Frondzeĭ

Abstract: A study was made of the efficiency of conversion of target-heating laser radiation into x rays emitted by a plasma in a wide range of laser radiation power densities (5×10¹¹–2×10¹⁴ W/cm²) and atomic numbers of the target material (4–92). Estimates were obtained of the exposure dose needed for x-ray photolithography of resists when such a laser-plasma source of soft x rays was used.

UDC: 621.375.826:621.039.64+537.531

PACS: 52.50.Jm, 52.25.Ps, 78.70.Dm, 85.40.Ci

Received: 23.08.1981