Abstract:
It is found that in a gas mixture typical of a $KrF$ laser, only a low-current prebreakdown ionization multiplication stage with an electron density $n_e \gtrsim10^{12}$ cm $^{-3}$ can be achieved. It is established that this discharge has a longer duration ($\sim1\mu$sec) and a higher efficiency for conversion of electrical energy into radiation of $KrF^*$ excimer molecules than a high-current discharge and may be used to develop electric-discharge excimer lasers.