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JOURNALS // Kvantovaya Elektronika // Archive

Kvantovaya Elektronika, 1981 Volume 8, Number 10, Pages 2254–2256 (Mi qe8596)

Brief Communications

Method for the fabrication of high-efficiency small-period diffraction gratings

A. S. Svakhin, V. A. Sychugov, T. V. Tulaĭkova


Abstract: A method was developed for the fabrication of high-efficiency diffraction gratings with an asymmetric line profile and a period of 0.4–1.2 µ over an area of 20 cm2. The gratings were made by ion etching of the substrate through a photoresist mask produced by a holographic method. The diffraction efficiency of these gratings reached 82.5% in the first negative order in an autocollimation configuration.

UDC: 621.372.826:621.315.61

PACS: 42.80.Fn

Received: 03.03.1981


 English version:
Soviet Journal of Quantum Electronics, 1981, 11:10, 1377–1379

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© Steklov Math. Inst. of RAS, 2024