Kvantovaya Elektronika, 1977 Volume 4, Number 1,Pages 69–75(Mi qe8808)
Laser interferometric profilograph
N. N. Evtikhiev, Yu. A. Snezhko, V. P. Tychinskiĭ, G. R. Levinson, V. P. Zakharov
Abstract:
A report is given of the development of a laser interferometer with a spatial resolution of 15–30μ. designed to measure waviness and deviations from the desired shape of surfaces with class 11–14 finish. Profilograms of various objects are given. The influence of destabilizing factors on the precision of the measurements is analyzed.
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