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JOURNALS // Uspekhi Khimii // Archive

Usp. Khim., 1993 Volume 62, Issue 1, Pages 39–54 (Mi rcr1079)

This article is cited in 7 papers

Processes amplifying the effects of light on polymer layers

A. V. Vannikov, A. D. Grishina

Frumkin Institute of Electrochemistry, Russian Academy of Sciences

Abstract: Processes bringing about amplification of the primary photoeffect in polymer layers through complex formation, autocatalysis, autosensitisation, and acid catalysis are discussed and their practical applications are considered. Attention is concentrated on highly sensitive photoresists for the photolithographic process used in advanced technologies. The bibliography includes 114 references.

UDC: 541.14+771.53

Received: 10.09.1992

DOI: 10.1070/RC1993v062n01ABEH000004


 English version:
Russian Chemical Reviews, 1993, 62:1, 35–49

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