Numerical study of mathematical models of MEMS resonators of different types

We present the results of a numerical study of mathematical models of MEMS resonators (microelectromechanical systems). The mathematical models of the devices are given by the statements of initial boundary value problems that describe the oscillations of the mobile electrode. Oscillations occur during the launch under the influence of the electrostatic field between the mobile and fixed electrodes in the micro gap, and then, after the launch, become free oscillations. The conditions for the appearance of oscillations of the mobile electrode are numerically determined in the form of a connection between the launch parameters and the parameters of the free oscillations.