O. E. Kaledin, N. K. Sorokina, L. A. Sukharev, “Scheme using neural networks for process control exposure to radiation on the structure of semiconductor materials”, Zhurnal SVMO, 2013, Volume 15, Number 4,Pages <nobr>190

Short Communications

Scheme using neural networks for process control exposure to radiation on the structure of semiconductor materials

O. E. Kaledin, N. K. Sorokina, L. A. Sukharev

Ogarev Mordovia State University

Abstract: In this paper, an algorithm for applying neural networks to analyze the structure of silicon by laser irradiation

Keywords: single crystal silicon, neural networks, statistical data.

UDC: 517.9