Mathematical modeling the process of gas flow in the turbomolecular pump using the Cercignani-Lampis gas-surface interaction model

In this paper, the process of gas flow in the flow path of a turbomolecular vacuum pump using the Cercignani-Lampis (CL) model was simulated. CL model was used as new boundary conditions when calculating the transition probability. The test particle method (Monte Carlo method) was used in the simulation. The calculation of the molecules transition probability through the blade channel in the forward and reverse directions, the transition resulting probability, the compression ratio was made.