Abstract:
The parameters of plasma and the kinetics of generation and loss of active particles are investigated under conditions of a dc glow discharge in hydrogen chloride. It is demonstrated that the generation of atoms in the investigated range of discharge parameters is largely supported by the dissociation of initial molecules under electron impact; however, bulk atomic-molecular reactions play a significant part in the balance of neutral components. The assumption of the first kinetic order of heterogeneous loss of atoms provides for adequate agreement of the experimentally obtained and calculated values of $E/N$ and of the density of positive ion flux to the surface of discharge tube. The population of vibrational levels of $\mathrm{HCl}$ is low, and the reactions involving vibrationally excited molecules may be eliminated from the material balance of neutral but not charged particles.