Plasma Investigations

Measurements of the gas temperature in a low-pressure radio-frequency discharge by the scanning calorimetry method

A. N. Magunov, O. V. Lukin, A. Yu. Gasilov

Institute of Microelectronics of the Russian Academy of Sciences, Yaroslavl

UDC: 533.924+536.24

Received: 20.10.1997

 English version: High Temperature, 1999, 37:2, 180–186

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