Modeling of Cluster Formation and Growth under Atomic Vapor Condensation

A model is presented of cluster formation and growth in supersaturated vapor of the clustering material. The model is based on numerical analysis of evolution of the cluster size distribution function. The calculations are performed on the basis of the presented model under cluster plasma parameters specific to the magnetron method of cluster generation. A comparison is made of the numerical experiment results with the estimates made by other authors. The results are presented of the numerical experiment with allowance for coalescence. The results are shown to be in agreement with those of calculations on the basis of the approximate analytical models within the domain of applicability of the latter.