Heat and Mass Transfer and Physical Gasdynamics

Special features of gasdynamic and diffusion processes in reactors for deposition of thin films

G. G. Gladush, L. G. Kurkina, N. B. Rodionov

Troitsk Institute for Innovation and Fusion Research

UDC: 533.9

Received: 07.08.1996

 English version: High Temperature, 1998, 36:2, 263–268

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