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Short Communications

Deposition of thin films during thermal vaporization of aluminum nitride in a vacuum

A. V. Kostanovskii, M. K. Gusev

Institute for High Temperatures, Russian Academy of Sciences, Moscow

UDC: 546.621.171.539.216

Received: 04.03.1994

 English version: High Temperature, 1995, 33:1, 162–164

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