Methods of Experimental Investigation and Measurements

Measuring the temperature of a silicon chip in a plasmochemical reactor by laser interferometry

A. N. Magunov, E. V. Mudrov

Institute of Microelectronics of the Russian Academy of Sciences, Yaroslavl

UDC: 533.924+535.417+536.5+621.315.592

Received: 24.10.1990

 English version: High Temperature, 1992, 30:2, 300–305

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