Abstract:
The results of experimental studies of the nonequilibrium plasmochemical method for production of polycrystalline silicon from quartz are presented. It is shown that polycrystalline silicon in the form of spherelike particles with an average size of 100–200 $\mu$m and purity of 99.8–99.9% can be obtained with a yield of up to 60% using the electric arc installation developed.