Methods of Experimental Investigation and Measurements

Optimizing semiconductor-wafer activation-annealing parameters

Yu. M. Matsevityi, R. Zh. Erzhanov, V. M. Timchenko, V. p. Sheryshev

Institute for Mechanical Engineering Problems, Kharkiv

UDC: 536.24.02

Received: 11.03.1992

 English version: High Temperature, 1992, 30:6, 980–985

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