Methods of Experimental Investigation and Measurements

Synthesis of thin-films of aluminum nitride

A. V. Kirillin, A. V. Kostanovskii, L. A. Zhylyakov

Institute for High Temperatures, USSR Academy of Sciences, Moscow

UDC: 546.621.171.1:539.216

Received: 22.12.1988

 English version: High Temperature, 1989, 27:6, 948–952

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