Kinetics and Concentration of Active Particles in Nonequilibrium Low Temperature Methane Plasma

We have investigated the stationary parameters and the composition of the DC glow discharge plasma ($p = 40$–$200$ Pa, $i = 30$–$70$ mA) in methane by means of the probe technique and numerical simulation. We have obtained data on the reduced strength of the electric field, on the rate constants of the processes under electron impact, and on the stationary concentrations of the neutral and charged particles.