Plasma Investigations

Spectral features of a HF discharge plasma in etching aluminum

V. V. Gusev, V. M. Dolgopolov, D. I. Slovetskii, E. F. Shelykhmanov

Moscow

UDC: 621.382.002

Received: 07.08.1981

 English version: High Temperature, 1983, 21:1, 19–25

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