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JOURNALS
// Teplofizika vysokikh temperatur
// Archive
TVT,
1983
Volume 21,
Issue 1,
Pages
22–29
(Mi tvt5859)
Plasma Investigations
Spectral features of a HF discharge plasma in etching aluminum
V. V. Gusev
,
V. M. Dolgopolov
,
D. I. Slovetskii
,
E. F. Shelykhmanov
Moscow
UDC:
621.382.002
Received:
07.08.1981
Fulltext:
PDF file (549 kB)
English version:
High Temperature, 1983,
21
:1,
19–25
Bibliographic databases:
©
Steklov Math. Inst. of RAS
, 2025