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JOURNALS // Uspekhi Fizicheskikh Nauk // Archive

UFN, 1995 Volume 165, Number 8, Pages 887–917 (Mi ufn1106)

This article is cited in 25 papers

REVIEWS OF TOPICAL PROBLEMS

Charged dislocations in semiconductor crystals

V. B. Shikina, Yu. V. Shikinab

a Institute of Solid State Physics, Russian Academy of Sciences, Chernogolovka, Moscow region
b Institute of Microelectronics Technology and High-Purity Materials RAS

Abstract: The current status of the subject of charged dislocations in germanium and silicon semiconductor crystals is discussed. Equilibrium properties of plastically deformed germanium and silicon are described by a phenomenological model of the electron spectrum of charged dislocations in these crystals. This model is a development of the Shockley–Read theory and it postulates two acceptor levels, $E_1$ and $E_2$ and also one donor level, $\varepsilon_1$. Moreover, it is necessary to introduce a finite capacity $C_1$ of the acceptor level $E_1$. The adopted model provides a self-consistent description of the main electrical properties of plastically deformed germanium and silicon. These properties include the conductivity of the crystals in the $n$ and $p$ states, details of inversion of the type of conduction caused by dislocations, some features of the current–voltage characteristics of crystals with oriented sets of dislocations, simplest relaxation phenomena, etc. In germanium, the level $E_1$ is located near $E_1\simeq0,1$ eV above the top of the valence band and its capacity is $C_1\lesssim0.1$. The corresponding parameters of silicon are $E_1\simeq0,4$ eV and $C_1\lesssim0.1$. It is worth noting the smallness of the capacitiy $C_1$, which justifies inclusion of this additional parameter among the characteristics of the electron spectrum of dislocations.

PACS: 61.72.Lk, 71.55.Cn, 72.80.Cw

Received: July 1, 1995

DOI: 10.3367/UFNr.0165.199508b.0887


 English version:
Physics–Uspekhi, 1995, 38:8, 845–875

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