Ya. S. Greenberg, Yu. A. Pashkin, E. Il'ichev, “Nanomechanical resonators”, UFN, 2012, Volume 182, Number 4,Pages <nobr>407

This article is cited in 54 papers

INSTRUMENTS AND METHODS OF INVESTIGATION

Nanomechanical resonators

Ya. S. Greenberg^a, Yu. A. Pashkin^bcd, E. Il'ichev^e

^a Novosibirsk State Technical University
^b NEC Green Innovation Research Laboratories and RIKEN Advanced Science Institute, Tsukuba, Ibaraki, Japan
^c Department of Physics, Lancaster University, Lancaster, UK
^d Lebedev Physical Institute, Russian Academy of Sciences
^e Institute of Photonic Technology, Jena, Germany

Abstract: We review the current state of research into the development of nanomechanical resonators and their application as components of nanoelectromechanical and optomechanical systems for the highly sensitive detection and visualization of material structure. Methods for the manufacture and characterization of nanoscale mechanical resonators are described. We discuss quantum properties of nanomechanical resonators and dynamical cooling schemes for suppressing fluctuations in order to increase the threshold sensitivity of optomechanical and electromechanical systems.

PACS: 61.46.-w; 62.25.-g; 81.07.-b; 81.07.Oj

Received: May 21, 2011
Revised: November 4, 2011
Accepted: November 16, 2011

DOI: 10.3367/UFNr.0182.201204c.0407