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JOURNALS
// Uspekhi Fizicheskikh Nauk
// Archive
UFN,
1990
Volume 160,
Number 6,
Pages
168–170
(Mi ufn7539)
BIBLIOGRAPHY
Current state of semiconductor silicon technology and material science
V. B. Timofeev
UDC:
621.315.592(049.3)
PACS:
01.30.Vv
,
85.40.-e
,
81.10.-h
,
81.15.-z
DOI:
10.3367/UFNr.0160.199006g.0168
Fulltext:
PDF file (88 kB)
English version:
Physics–Uspekhi, 1990,
33
:6,
492–493
©
Steklov Math. Inst. of RAS
, 2024
Fulltext:
PDF file (88 kB)