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JOURNALS // Uspekhi Fizicheskikh Nauk // Archive

UFN, 1976 Volume 120, Number 4, Pages 706–708 (Mi ufn9935)

This article is cited in 24 papers

MEETINGS AND CONFERENCES

Annealing of Ion-Implanted Layers Under the Action of Laser Radiation

M. M. Zaripov, I. B. Khaibullin, E. I. Shtyrkov


UDC: 621.315.592(048)

PACS: 01.10.Fv

DOI: 10.3367/UFNr.0120.197612n.0706


 English version:
Physics–Uspekhi, 1976, 19:12, 1032–1033


© Steklov Math. Inst. of RAS, 2024