Abstract:
The study deals with the optical interconnect between VLSIs on a PCB with fluorine-containing polymers. Various aspects of the UF photolithography for making polymer waveguides are discussed. The results of the research aimed at making a high-speed optical data bus for SoC (supercomputers) with PCB polymer waveguide arrays.
Keywords:optical interconnects, polymer waveguides, PCB optical data bus, supercomputer.