Modeling of a High-Frequency Capacitive Discharge with a Large Inter-Electrode Distance. I. Statement of the Problem

We construct a one-dimensional mathematical model of a transient high-frequency low-pressure plasma, which makes it possible to determine the basic characteristics of the plasma in a high-frequency low-pressure capacitive discharge with a large inter-electrode distance and describe the plasma's behavior in the near-electrode regions taking into account the heating of the gas.