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JOURNALS // Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki // Archive

Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, 2015 Volume 157, Book 2, Pages 126–140 (Mi uzku1312)

This article is cited in 3 papers

Numerical simulation of the high-frequency capacitive discharge

V. Yu. Chebakova

Kazan (Volga Region) Federal University, Kazan, Russia

Abstract: The nonlinear problem of determining the interaction parameters between the high-frequency capacitive discharge and the sample placed on a substrate in the local approximation is considered. The problem is described by a system of nonlinear initial-value problems. A numerical method for solving this problem is suggested. The results of numerical experiments for the model problem are given. Comparative analysis of these results with the characteristics of the high-frequency capacitive discharge without the sample is carried out.

Keywords: mathematical simulation, high-frequency capacitive discharge, electric field strength, electronic and gas temperature, concentration of electrons, concentration of ions, numerical experiments.

UDC: 517.958+533.9

Received: 26.02.2015



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