Three-dimensional Structure of Electromagnetic Fields in an Inductively Coupled Plasma.

A new method for calculating three-dimensional structure of electromagnetic fields in inductively coupled plasma is developed. The method is based on Fourier expansion of electromagnetic fields and plasma conductivity to polar harmonics. A temporal dynamics of three-dimensional spatial structure of electromagnetic fields in the inductively coupled plasma and spatial distribution of energy fluxes into plasma are calculated. Asymmetrical shape of the inductor is shown to result in significant asymmetry of electromagnetic fields in inductively coupled plasma.