Management of technological process of integral element structures formation

Production of integral elements is a complex multifactorial and multistage process. Modern technological processes of formation of integral elements structures are provided with the use of low-temperature non-equilibrium pulsed and radiation-induced technological operations. Solution of the problem of technological processes management is based on understanding of the relationship between the properties of products, particularities of their production technology and characteristics of the equipment with which this technology is realized. The developed approaches to the technological process control eliminate the subjective factor and increase the efficiency of management systems. It is shown, that the main technological operations, significantly affecting the output characteristics of integral elements in their production are ion implantation, annealing, etching. The study and simulation of these operations will make recommendations on management and develop algorithms for effective management of technological process of formation of the structures of integral elements.