On an inverse problem of quantitative electron probe microanalysis

A method for the tracer-free experimental determination of the function generating the in-depth characteristic X-ray used for evaluation of component concentrations in electron probe microanalysis is considered. Application of our method brings about to an inverse problem for a Fredholm equation of the first kind. An algorithm for solving this problem is proposed; the algorithm is based on the information given a priori and on physical restrictions imposed on the sought-for function.