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JOURNALS // Numerical methods and programming // Archive

Num. Meth. Prog., 2002 Volume 3, Issue 1, Pages 110–115 (Mi vmp743)

Data preparation, treatment and visualization for constructing holograms with the electron-beam installation ZBA-21

S. Yu. Seryozhnikov

Institute of Numerical Mathematics, Russian Academy of Sciences, Moscow

Abstract: A program package was developed for the design and construction of computer-generated holograms with the aid of the technology based on electron-beam lithography (the installation ZBA-21 was used). The package allows one to visualize microreliefs prepared for exposition, to transform data from the raster format to the ZBA-format, and to form data sets for exposition of holograms from individual elements. The package is used at the Research Computing Center of Moscow State University to design computer-generated holograms.

Keywords: computer-generated holograms, electron-beam lithography, data visualization.

UDC: 519.6:629.78



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