Analysis and elimination of influence of the optical extent on the parametric estimator of the surface microrelief which is produced by the optical and electronic complex
Abstract:
In this article the method of compensation of auxillary measurement error by means of optical and electronic complex of the parameters of surface microrelief which appears as a result of the deflection of the light flux level from its nominal meaning is viewed. The method is based on the determination of autocorrelative functions by the image of analyzed surface.