Controlled bending of a charged elastic cantilever in electric field

The bending of ultrathin single-layer metal plates in a controlled electric field is modeled. The plate (cantilever) form factor corresponds to elements of high-speed optical shutters in dynamic X-ray lithography. System controllability under the influence of a slowly varying electric field is investigated. The cantilever is a thin rectangular elastic plate, clamped on one side and hinged supported at a certain distance from the opposite free side. Problems of static bending and natural vibrations with a constant electric potential applied to the cantilever are studied. Cantilever motion is simulated with a given feedforward control of this potential over time under transverse bending conditions.