Stable method for optical monitoring the deposition of multilayer optical coatings

For optical monitoring of layer thickness in the deposition of multilayer optical coatings, a stable method is proposed that completely eliminates the cumulative effect of errors in the thicknesses of deposited layers. The considered monitoring method relies on a nonlocal algorithm for analyzing data measured in the course of coating deposition monitoring. Computer simulation of coating deposition is used to demonstrate the effectiveness of the proposed type of monitoring as compared with other optical monitoring methods.