Comparative analysis of algorithms for solving inverse problems related to monochromatic monitoring the deposition of multilayer optical coatings

The paper presents a comparative analysis of three fundamentally different algorithms for solving inverse problems of monitoring the layer thicknesses of optical coatings based on the data of monochromatic measurements of the reflection/transmission coefficients during deposition process. The previously developed geometric approach to the study of the thickness error correlation of deposited coatings is extended to the case of monochromatic measurements. A new parameter called the self-compensation factor was introduced to estimate the effect of error self-compensation. Its role in assessing the prospects for using various algorithms for coating deposition monitoring is shown.