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JOURNALS // Uspekhi Fizicheskikh Nauk // Archive

UFN, 2020 Volume 190, Number 12, Pages 1293–1333 (Mi ufn6709)

This article is cited in 17 papers

INSTRUMENTS AND METHODS OF INVESTIGATION

Electrohydrodynamic emitters of ion beams

P. Mazarova, V. G. Dudnikovbc, A. B. Tolstoguzovdef

a Raith GmbH, Dortmund
b Novosibirsk State University
c Budker Institute of Nuclear Physics, Siberian Branch of the Russian Academy of Sciences, Novosibirsk
d Utkin Ryazan State Radio Engineering University
e Department of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University
f Centre for Physics and Technological Research (CeFITec), Dept. de Fisica da Faculdade de Ciencias e Tecnologia (FCT), Universidade Nova de Lisboa

Abstract: We discuss physical processes underlying the generation of ion beams with high emission current density in electrohydrodynamic (EHD) emitters based on liquid metals and alloys and with room temperature ionic liquids. We consider EHD effects that influence the emission of ions (ion production mechanisms) and the kinetics of ion interactions in high-density beams. We analyze the factors determining the emission zone size, sustainability of emission at high and low currents, generation of clusters, increase in energy spread, decrease in brightness, and other features of ion beams. We consider the specific design features of EHD emitters and the problems of practically ensuring their stable operation. Discussed in detail are modern application areas for ion sources with EHD emitters, including technological installations for ion beam lithography, micro- and nanopatterning, ion microscopes and tools for local mass spectrometry of secondary ions, and systems to control and neutralize the potential of spacecraft as well as electrostatic rocket engines (microthrusters). We analyze prospects for further development of EHD emitters themselves and instruments based on them.

Keywords: electrodynamics, liquid metal ion source, room temperature ionic liquid, nanopatterning, secondary ion mass spectrometry, ion beam lithography, liquid metals and alloys, nanotechnology.

PACS: 29.25.Ni, 41.75.-i, 81.16.Nd

Received: December 14, 2019
Revised: July 13, 2020
Accepted: September 29, 2020

DOI: 10.3367/UFNr.2020.09.038845


 English version:
Physics–Uspekhi, 2020, 63:12, 1219–1255

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© Steklov Math. Inst. of RAS, 2025