A. E. Ieshkin, A. B. Tolstoguzov, N. G. Korobeishchikov, V. O. Pelenovich, V. S. Chernysh, “Gas-dynamic sources of cluster ions for basic and applied research”, UFN, 2022, Volume 192, Number 7,Pages <nobr>722

This article is cited in 25 papers

INSTRUMENTS AND METHODS OF INVESTIGATION

Gas-dynamic sources of cluster ions for basic and applied research

A. E. Ieshkin^a, A. B. Tolstoguzov^bcd, N. G. Korobeishchikov^e, V. O. Pelenovich^c, V. S. Chernysh^a

^a Faculty of Physics, Lomonosov Moscow State University
^b Utkin Ryazan State Radio Engineering University
^c Department of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University
^d Centre for Physics and Technological Research (CeFITec), Dept. de Fisica da Faculdade de Ciencias e Tecnologia (FCT), Universidade Nova de Lisboa
^e Novosibirsk State University

Abstract: State of the art in the development and application of gas cluster ion sources is considered. The mechanisms of neutral cluster formation, the techniques applied to study their flows and regularities of ionization and the principles of mass separation of ion beams are discussed. Design features of some cluster ion beam sources intended for various applied and academic studies are considered. Use of such sources for controlled modification of surface topography, ultra-shallow ion implantation, development of analytical techniques, and stimulation of surface chemical reactions is analyzed.

Keywords: clusters, gas cluster ions, ion sources, supersonic flows, ionization, mass separation, sputtering, self-organization, ion implantation, XPS, SIMS.

PACS: 29.25.Ni, 36.40.-c, 41.75.-i, 68.49.Sf

Received: March 23, 2021
Revised: May 20, 2021
Accepted: June 7, 2021

DOI: 10.3367/UFNr.2021.06.038994