Effect of material of metal sublayer and deposition configuration on the texture formation in the piezoactive ZnO films
A. G. Veselov, V. I. Elmanov, O. A. Kiryasova, Yu. V. Nikulin

This publication is cited in the following articles:

1. A. G. Veselov, V. I. Elmanov, O. A. Kiryasova, Yu. V. Nikulin, “Dependence of texture tilt and excitation efficiency of shear waves for ZnO films on working gas pressure in a DC magnetron system”, Tech. Phys., 64:5 (2019), 730–736        
2. V. A. Luzanov, S. G. Alekseev, N. I. Polzikova, “Deposition Process Optimization of Zinc Oxide Films with Inclined Texture Axis”, J. Commun. Technol. Electron., 63:9 (2018), 1076