RUS  ENG
Полная версия
ЖУРНАЛЫ // Теплофизика высоких температур

ТВТ, 2019, том 57, выпуск 5, страницы 621–627 (Mi tvt11199)

Hybrid microwave-DC discharge in nitrogen at reduced pressures
Yu. A. Lebedev, G. V. Krashevskaya, A. Yu. Titov, I. L. Epshtein

Список литературы

1. Samukawa, S., et al., J. Phys. D: Appl. Phys., 45 (2012), 253001  crossref  adsnasa
2. Bruggeman, P.J., et al., Plasma Sources Sci. Technol., 25 (2016), 053002  crossref  adsnasa  elib
3. Heintz, R.J., Appl. Phys., 39 (1968), 1741  crossref  scopus
4. Suzuki, K., Okudira, S., Sakudo, N., and Kanomata, I., Jpn. J. Appl. Phys., 16 (1977), 1979  crossref  adsnasa  scopus
5. Bardos, L., Dragila, R., Lonear, G., and Musil, J., Rozpr. Cesk. Akad. Ved, Rada Tech. Ved., 93 (1983), 86
6. Ohkubo, K. and Matsuda, K., Jpn. J. Appl. Phys., 17 (1978), 117  crossref  adsnasa  scopus
7. Proc. 8th Int. Symp. Plasma Chem., Special Symp. ECR and Magnetomicrowave Plasma, Tokyo, Japan, 1987, 2399
8. Musil, J., Vacuum, 36 (1986), 161  crossref  adsnasa  scopus
9. Microwave Excited Plasmas, eds. Moisan, M. and Pelletier, J., Elsevier, Amsterdam, 1992
10. Klemberg-Sapieha, J.E., Küttel, O.M., and Wertheimer, M.R., Thin Solid Films, 193–194 (1990), 965  crossref  adsnasa  scopus
11. Reinke, P., Bureau, S., Klemberg-Sapieha, J.E., and Martinu, L., J. Appl. Phys., 78 (1994), 4855  crossref  adsnasa  scopus
12. Ivanov, O.A., Lobaev, M.A., Isaev, V., and Vikharev, A.L., Phys. Rev. Accel. Beams, 13 (2010), 022004  crossref  adsnasa  scopus
13. Tang, D. and Chu, P.K., J. Appl. Phys., 93 (2003), 5883  crossref  adsnasa  scopus
14. Frolov, V., Matveev, I., Ivanov, D., Zverev, S., Ushin, B., and Petrov, G., Rom. J. Phys., 56:1 (suppl.) (2011), 36  elib
15. Kuo, S.P., Bivolaru, D., Williams, S., and Carter, C.D., Plasma Sources Sci. Technol., 15 (2006), 266  crossref  adsnasa  scopus
16. Itarashiki, T., Hayashi, N., and Yonesu, A., Jpn. J. Appl. Phys., 55:1S (2006), 01AB03
17. Pearton, S.J., Chakrabarti, U.K., Katz, A., et al., Plasma Chem. Plasma Process, 11 (1991), 405  crossref  mathscinet  scopus
18. Hala, A.M., Oksuz, L., and Zhu, X., Plasma Sci. Technol., 18 (2016), 832  crossref  adsnasa  scopus
19. Ayrapetov, A., Kralkina, E., Neklyudova, P., et al., Nanoindustriya, 2016, no. 8, 104 http://www.nanoindustry.su/journal/article/en/5795  crossref
20. Abdali, A., Moritz, B., Gupta, A., et al., J. Optoelectron. Adv. Mater., 12 (2010), 440  elib
21. Lebedev, Yu.A., Plasma Sources Sci. Technol., 24 (2015), 053001  crossref  adsnasa  elib  scopus
22. Lebedev, Yu.A., Tatarinov, A.V., and Epshtein, I.L., High Temp., 45:3 (2007), 283  mathnet  crossref  elib  scopus
23. Lebedev, Yu.A. and Yusupova, E.V., Plasma Phys. Rep., 38:8 (2012), 620  crossref  adsnasa  elib  scopus
24. Lebedev, Yu.A., Epstein, I.L., and Yusupova, E.V., High Temp., 52:2 (2014), 150  mathnet  crossref  elib  scopus
25. Pearse, R.W.B. and Gaydon, A.G., The Identification of Molecular Spectra, 4th ed., Chapman and Hall, London, 1976
26. Cicala, G., De Tommaso, E., Rain, A.C., et al., Plasma Sources Sci. Technol., 18 (2009), 025032  crossref  adsnasa  elib  scopus
27. Lebedev, Yu.A., Tatarinov, A.V., and Epstein, I.L., Plasma Sources Sci. Technol., 16 (2007), 726  crossref  adsnasa  elib  scopus
28. Lebedev, Yu.A., Solomakhin, P.V., and Shakhatov, V.A., Plasma Phys. Rep., 33:2 (2007), 157  crossref  mathscinet  adsnasa  elib  scopus
29. Lebedev, Yu.A. and Epstein, I.L., Plasma Phys. Rep., 33:1 (2007), 63  crossref  adsnasa  elib  scopus
30. Lebedev, Yu.A., Tatarinov, A.V., and Epshtein, I.L., High Temp., 49:5 (2010), 775
31. Bardos, L. and Lebedev, Yu.A., High Temp., 38:4 (2000), 528  mathnet  crossref  scopus


© МИАН, 2026