Yu. A. Lebedev, G. V. Krashevskaya, A. Yu. Titov, I. L. Epshtein
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Список литературы
|
|
| |
| 1. |
Samukawa, S., et al., J. Phys. D: Appl. Phys., 45 (2012), 253001 |
| 2. |
Bruggeman, P.J., et al., Plasma Sources Sci. Technol., 25 (2016), 053002 |
| 3. |
Heintz, R.J., Appl. Phys., 39 (1968), 1741 |
| 4. |
Suzuki, K., Okudira, S., Sakudo, N., and Kanomata, I., Jpn. J. Appl. Phys., 16 (1977), 1979 |
| 5. |
Bardos, L., Dragila, R., Lonear, G., and Musil, J., Rozpr. Cesk. Akad. Ved, Rada Tech. Ved., 93 (1983), 86 |
| 6. |
Ohkubo, K. and Matsuda, K., Jpn. J. Appl. Phys., 17 (1978), 117 |
| 7. |
Proc. 8th Int. Symp. Plasma Chem., Special Symp. ECR and Magnetomicrowave Plasma, Tokyo, Japan, 1987, 2399 |
| 8. |
Musil, J., Vacuum, 36 (1986), 161 |
| 9. |
Microwave Excited Plasmas, eds. Moisan, M. and Pelletier, J., Elsevier, Amsterdam, 1992 |
| 10. |
Klemberg-Sapieha, J.E., Küttel, O.M., and Wertheimer, M.R., Thin Solid Films, 193–194 (1990), 965 |
| 11. |
Reinke, P., Bureau, S., Klemberg-Sapieha, J.E., and Martinu, L., J. Appl. Phys., 78 (1994), 4855 |
| 12. |
Ivanov, O.A., Lobaev, M.A., Isaev, V., and Vikharev, A.L., Phys. Rev. Accel. Beams, 13 (2010), 022004 |
| 13. |
Tang, D. and Chu, P.K., J. Appl. Phys., 93 (2003), 5883 |
| 14. |
Frolov, V., Matveev, I., Ivanov, D., Zverev, S., Ushin, B., and Petrov, G., Rom. J. Phys., 56:1 (suppl.) (2011), 36 |
| 15. |
Kuo, S.P., Bivolaru, D., Williams, S., and Carter, C.D., Plasma Sources Sci. Technol., 15 (2006), 266 |
| 16. |
Itarashiki, T., Hayashi, N., and Yonesu, A., Jpn. J. Appl. Phys., 55:1S (2006), 01AB03 |
| 17. |
Pearton, S.J., Chakrabarti, U.K., Katz, A., et al., Plasma Chem. Plasma Process, 11 (1991), 405 |
| 18. |
Hala, A.M., Oksuz, L., and Zhu, X., Plasma Sci. Technol., 18 (2016), 832 |
| 19. |
Ayrapetov, A., Kralkina, E., Neklyudova, P., et al., Nanoindustriya, 2016, no. 8, 104 http://www.nanoindustry.su/journal/article/en/5795 |
| 20. |
Abdali, A., Moritz, B., Gupta, A., et al., J. Optoelectron. Adv. Mater., 12 (2010), 440 |
| 21. |
Lebedev, Yu.A., Plasma Sources Sci. Technol., 24 (2015), 053001 |
| 22. |
Lebedev, Yu.A., Tatarinov, A.V., and Epshtein, I.L., High Temp., 45:3 (2007), 283 |
| 23. |
Lebedev, Yu.A. and Yusupova, E.V., Plasma Phys. Rep., 38:8 (2012), 620 |
| 24. |
Lebedev, Yu.A., Epstein, I.L., and Yusupova, E.V., High Temp., 52:2 (2014), 150 |
| 25. |
Pearse, R.W.B. and Gaydon, A.G., The Identification of Molecular Spectra, 4th ed., Chapman and Hall, London, 1976 |
| 26. |
Cicala, G., De Tommaso, E., Rain, A.C., et al., Plasma Sources Sci. Technol., 18 (2009), 025032 |
| 27. |
Lebedev, Yu.A., Tatarinov, A.V., and Epstein, I.L., Plasma Sources Sci. Technol., 16 (2007), 726 |
| 28. |
Lebedev, Yu.A., Solomakhin, P.V., and Shakhatov, V.A., Plasma Phys. Rep., 33:2 (2007), 157 |
| 29. |
Lebedev, Yu.A. and Epstein, I.L., Plasma Phys. Rep., 33:1 (2007), 63 |
| 30. |
Lebedev, Yu.A., Tatarinov, A.V., and Epshtein, I.L., High Temp., 49:5 (2010), 775 |
| 31. |
Bardos, L. and Lebedev, Yu.A., High Temp., 38:4 (2000), 528 |