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Institute of Microelectronics Technology and High-Purity Materials RAS, Chernogolovka, Moskovskaya obl., Russia
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Address: Russia, 142432, Chernogolovka, Moskovskaya obl., Institutskaya, 6
Phone: +7 (495) 962 80 74
Fax: +7 (495) 962 80 47
E-mail:
Website: https://www.ipmt-hpm.ac.ru
Number of persons: 104
Number of authors: 132
Number of publications: 157
Other institution names:
- Institute for Problems of Technology and Microelectronics, Academy of the Sciences of the USSR
- Institute Problems of Technology Microelectronics and High-Purity Materials, Academy of the
Sciences of the USSR
© , 2024
