Rudenko Konstantin Vasil'evich

Publications in Math-Net.Ru

1. Atomic layer deposition of thin films onto 3$D$ nanostructures: the effect of wall tilt angle and aspect ratio of trenches
   
   Zhurnal Tekhnicheskoi Fiziki, 88:10 (2018),  1573–1580
2. Analytical model for atomic-layer deposition of thin films on the walls of cylindrical holes with a relatively high aspect ratio
   
   Zhurnal Tekhnicheskoi Fiziki, 88:8 (2018),  1264–1272
3. Analytical model of atomic layer deposition of films on 3D structures with high aspect ratios
   
   Zhurnal Tekhnicheskoi Fiziki, 88:2 (2018),  243–250
4. Biosensor properties of SOI nanowire transistors with a PEALD Al$_{2}$O$_{3}$ dielectric protective layer
   
   Fizika i Tekhnika Poluprovodnikov, 50:5 (2016),  643–649