Poletayev Sergey Dmitriyevich

Publications in Math-Net.Ru

1. Specific features of matching of a lower electrode and an RF bias generator for reactive ion etching of bulk substrates
   
   Zhurnal Tekhnicheskoi Fiziki, 91:4 (2021),  657–663
2. Influence of the asymmetry of the metal mask arrangement on the matching of the lower electrode with a high-frequency displacement generator during reactive-ion etching of massive substrates
   
   Fizika i Tekhnika Poluprovodnikov, 55:12 (2021),  1255–1259
3. The influence of metal masks on matching of the lower electrode and a high-frequency bias generator at reactive ion etching of large substrates
   
   Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:11 (2021),  44–47
4. Precision laser recording of microstructures on molybdenum films for generating a diffractive microrelief
   
   Computer Optics, 40:3 (2016),  422–426
5. Numerical simulation of the ablation of thin molybdenum films under laser irradiation
   
   Zhurnal Tekhnicheskoi Fiziki, 86:9 (2016),  1–6
6. Specific features of the laser irradiation of thin molybdenum films
   
   Zhurnal Tekhnicheskoi Fiziki, 86:4 (2016),  101–105
7. Microprofile formation by thermal oxidation of molybdenum films
   
   Pisma v Zhurnal Tekhnicheskoi Fiziki, 42:3 (2016),  106–110
8. Study of focusing into closely spaced spots via illuminating a diffractive optical element by a short-pulse laser beam
   
   Computer Optics, 39:2 (2015),  187–196
9. Application of thin molybdenum films in contact masks for manufacturing the micro-relief of diffractive optical elements
   
   Computer Optics, 38:4 (2014),  757–762