Zhikharev Evgeny Nikolaevich

Publications in Math-Net.Ru

1. Nanophotonic structure formation by dry e-beam etching of the resist: resolution limitation origins
   
   Computer Optics, 41:4 (2017),  499–503
2. Some peculiarities of a new method of microrelief creation by the direct electron-beam etching of resist
   
   Computer Optics, 39:2 (2015),  204–210