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Publications in Math-Net.Ru
Ferroelectric properties of strontium-bismuth tantalate thin film deposited by RF magnetron sputtering method
PFMT
, 2018, no. 1(34),
33–37
Formation of titanium nitride films by reactive magnetron sputtering under low pressure
PFMT
, 2016, no. 2(27),
12–17
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Steklov Math. Inst. of RAS
, 2024