Publications in Math-Net.Ru
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Smoothing of polycrystalline AlN thin films with argon cluster ions
Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:6 (2021), 44–47
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Population of the metastable $A^3\Sigma_{u}$ state of molecular nitrogen under conditions of plasma chemical synthesis of metal nitrides
Zhurnal Tekhnicheskoi Fiziki, 89:2 (2019), 184–188
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Numerical analysis of the kinetics of chemical reactions in an argon-silane plasma of the glow discharge
Vestn. Tomsk. Gos. Univ. Mat. Mekh., 2017, no. 50, 79–89
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Temperature effect of a substrate on optical properties of the thin films of the amorphous hydrogenated silicon deposited by a plasmo-chemical jet method
CPM, 18:3 (2016), 428–438
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Ionization in magnesium vapor-phase diffusion flames at reduced pressures
Fizika Goreniya i Vzryva, 20:6 (1984), 48–54
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