RUS
ENG
Full version
PEOPLE
Gusev V M
Publications in Math-Net.Ru
The effect of channelling on the distribution of electrically active boron and phosphorus atoms intruded into silicon single crystals
Dokl. Akad. Nauk SSSR
,
197
:2 (1971),
319–322
©
Steklov Math. Inst. of RAS
, 2024