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Mhin S

Publications in Math-Net.Ru

  1. Dielectric sol-gel coatings based on silica dioxide for surface planarization of integral microcircuits

    PFMT, 2020, no. 4(45),  7–14
  2. Research of structural and mechanical properties of protective sol-gel coatings based on oxides Si, Ti, Zr and their complexes

    PFMT, 2018, no. 4(37),  21–24

© Steklov Math. Inst. of RAS, 2024