Nguyen T D

Publications in Math-Net.Ru

1. Formation of tantalum oxide films on substrates with a diameter of 200 mm
   
   PFMT, 2020, no. 1(42),  12–17
2. Dielectric properties of tantalum oxide thin films deposited by reactive magnetron sputtering
   
   PFMT, 2019, no. 2(39),  15–20