Birth date: 27.08.1989
Phone: +7 (499) 720 69 07, +7 (963) 604 71 82
E-mail:
Website: http://ckp-miet.ru/
Keywords: surface, topography, curvature, curvature radius, deflection, mechanical stresses, strain, silicon wafer, Stoneys equation, optical profilometry, defectiveness, geomorphometry, digital elevation model, ellipsometry

Subject:

MEMS, analysis of mechanical stresses, applications of optical research methods

Main publications:

1. Dedkova A.A., Dyuzhev N.A., Gisev E.E., Shtern M.Yu., “Fast Nondestructive Technique for Analyzing Deflection of Membranes Located on the Substrate”, Russian Journal of Nondestructive Testing, 5:5 (2020), 52-59
2. Dedkova A.A., Nikiforov M.O., Mitko S.V., Kireev V.Yu., “Investigation of Gallium Nitride Island Films on Sapphire Substrates via Scanning Electron Microscopy and Spectral Ellipsometry”, Nanotechnologies in Russia, 14:3-4 (2019), 176-183
3. Novak A.V., Novak V.R., Dedkova A.A., Gusev E.E., “Dependence of Mechanical Stresses in Silicon Nitride Films on the Mode of Plasma-Enhanced Chemical Vapor Deposition”, Semiconductors, 52:15 (2018), 1953-1957

Publications in Math-Net.Ru

Personal pages:

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Organisations:

• National Research University of Electronic Technology